| 摘要 |
An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever ( 3 ) using an optical resonator between the cantilever ( 3 ) and an output surface ( 12 b) of a lens assembly ( 10 ). In order to form the resonator, output surface ( 12 b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly ( 10 ) and cantilever ( 3 ) comparatively large. |
