发明名称 |
ASPECT RATIO TRAPPING FOR MIXED SIGNAL APPLICATIONS |
摘要 |
Structures and methods for their formation include a substrate comprising a first semiconductor material, with a second semiconductor material disposed thereover, the first semiconductor material being lattice mismatched to the second semiconductor material. Defects are reduced by using an aspect ratio trapping approach.
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申请公布号 |
US2008070355(A1) |
申请公布日期 |
2008.03.20 |
申请号 |
US20070857047 |
申请日期 |
2007.09.18 |
申请人 |
AMBERWAVE SYSTEMS CORPORATION |
发明人 |
LOCHTEFELD ANTHONY J.;FIORENZA JAMES |
分类号 |
H01L21/338 |
主分类号 |
H01L21/338 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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