| 摘要 |
A heat treatment apparatus is provided to prevent direct contact of a lid and a furnace throat by squashing a sealing member between the lid and the furnace throat when an internal pressure of a processing vessel is reduced. A processing vessel(3) comprises a furnace throat, and a vessel main body made of quartz which accommodates processing objects to perform a specified heat treatment under pressure reduction. A metallic lid(15) comprises a holder for holding a plurality of process objects so as to load and unload the holder into and from the processing vessel and to close and open the furnace throat. An annular sealing member is disposed on the lid to seal a gap between the lid and the furnace throat. Wherein a contact-preventing member(33) is disposed between the lid and the furnace throat to prevent contact of the lid with the furnace throat due to squashing of the sealing member.
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