发明名称 |
Positive -Working Photoimageable Bottom Antireflective Coating |
摘要 |
The present invention relates to a positive bottom photoimageable antireflective coating composition which is capable of being developed in an aqueous alkaline developer, wherein the antireflective coating composition comprises a polymer comprising at least one recurring unit with a chromophore group and one recurring unit with a hydroxyl and/or a carboxyl group, a vinyl ether terminated crosslinking agent, and optionally, a photoacid generator and/or an acid and/or a thermal acid generator. The invention further relates to a process for using such a composition. |
申请公布号 |
US2008090184(A1) |
申请公布日期 |
2008.04.17 |
申请号 |
US20070877891 |
申请日期 |
2007.10.24 |
申请人 |
SUI YU;WU HENGPENG;KANG WENBING;NEISSER MARK O;KATAYAMA TOMOHIDE;DING-LEE SHUJI S;HISHIDA ARITAKA;OBERLANDER JOSEPH E;TOUKHY MEDHAT E |
发明人 |
SUI YU;WU HENGPENG;KANG WENBING;NEISSER MARK O.;KATAYAMA TOMOHIDE;DING-LEE SHUJI S.;HISHIDA ARITAKA;OBERLANDER JOSEPH E.;TOUKHY MEDHAT E. |
分类号 |
G03F7/20;G03F7/039;G03F7/09 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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