| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar battery element that can reduce facilities and the manufacturing processes as compared with a prior art, and form an inverse conductivity type layer and a BSF layer on a silicon board by a simple method.SOLUTION: A method of manufacturing a solar battery element comprises: a board arranging step of arranging a silicon board on two n-type silicon boards each having a first main surface and a second main surface in a film forming chamber while the second main surfaces are proximate to each other; an oxide layer forming step of heating the silicon board while first gas containing oxygen and no boron is supplied into the film forming chamber, thereby forming an oxide layer containing silicon oxide at each of the first main surface side and the second main surface side; a first glass layer forming step of heating the silicon board while second gas containing boron is supplied into the film forming chamber, thereby forming a first glass layer containing boron on the oxide layer formed at the first main surface side; and a p-type region forming step of diffusing boron from the first glass layer into the first main surface to form a p-type region.SELECTED DRAWING: Figure 7 |
