| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic device including a plurality of MR elements containing a magnetic material layer provided on the same substrate and magnetized in directions different from each other. SOLUTION: The MR elements 42A to 42D including a magnetic reference layer are formed on the same substrate 35 and a protective layer and a hard magnet layer are formed to cover them. The hard magnet layer is patterned to form a first pattern 43A covering the MR elements 42C, 42D and second and third patterns 43B, 43C holding the MR elements 42A, 42B therebetween in the in-plane direction. The first to third patterns 43A to 43 C are magnetized by exposing them to an external magnetic field. After removing the external magnetic field, their entire are heat treated at a temperature higher than a blocking temperature of an AFM layer and lower than a Curie temperature of the first to third patterns 43A to 43 C. After cooling, the first to third patterns 43A to 43 C are removed. COPYRIGHT: (C)2009,JPO&INPIT
|
