DIFFRACTION OPTICAL ELEMENT, PROJECTION DEVICE, AND MEASUREMENT DEVICE

摘要

To make it possible to emit a light pattern with a uniform light quantity within a detection surface in spite of 0th-order diffracted light included therein or to emit a light pattern for overall irradiation with a uniform light quantity distribution, without limiting a degree of freedom for design of the emitted light pattern.;In a diffraction optical element according to the invention, a divergence angle converting function that is a function of converting the divergence angle of incident light due to diffraction effect and a light beam splitting function that is a function of splitting an incident light beam into a plurality of light beams due to diffraction effect are combined so that incident light as divergent light is split into a plurality of diffracted lights with different divergence angles from the divergence angle of the incident light and the diffracted lights is emitted.

主权项

1. A diffraction optical element, wherein:
a divergence angle converting function of converting a divergence angle of incident light based on diffraction effect and a light beam splitting function of splitting an incident light beam into a plurality of light beams based on diffraction effect are combined so that the incident light as a divergent light is split into a plurality of diffracted lights having divergence angles different from the divergence angle of the incident light and the diffracted lights is emitted.