发明名称 半導体装置及びその製造方法
摘要 A semiconductor device includes a semiconductor body including a first upper surface with a first side surface extending downwardly therefrom, a second upper surface with a second side surface extending downwardly therefrom, and a bottom surface interfacing first and second side surfaces. The first and second side surfaces and the bottom surface together define a groove. A conductive film partially fills the groove with an intervention of an insulating film therebetween so the conductive film terminates at a first intermediate portion of the first side surface between the first upper surface and the bottom surface and at a second intermediate portion of the second side surface between the second upper surface and the bottom surface. A distance between the first intermediate portion of the first side surface and the first upper surface exceeds a distance between the second intermediate portion of the second side surface and the second upper surface.
申请公布号 JP6054046(B2) 申请公布日期 2016.12.27
申请号 JP20120062404 申请日期 2012.03.19
申请人 ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. 发明人 浜田 耕治
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
代理机构 代理人
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