发明名称 Self-aligned trimmed pole
摘要 A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a uniform width above and below a write gap layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the alumina write-gap filling material. The present method uses NiCr, NiFeCr or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant.
申请公布号 US2005168871(A1) 申请公布日期 2005.08.04
申请号 US20050091160 申请日期 2005.03.28
申请人 HEADWAY TECHNOLOGIES, INC. 发明人 HAN CHERNG-CHYI;CHEN MAO-MIN;LIU FENGLIN
分类号 G11B5/31;(IPC1-7):G11B5/147 主分类号 G11B5/31
代理机构 代理人
主权项
地址