发明名称 Droplet jetting apparatus, method of operating droplet jetting apparatus, and device manufacturing method
摘要 A droplet jetting apparatus having a droplet jetting head including a nozzle opening formed in a nozzle formation surface, from which droplets of a predetermined liquid are jetted, and a capping device for capping the nozzle opening of the head. A moisture retentive liquid supply device connected to the capping device is provided for supplying a moisture retentive liquid with respect to the predetermined liquid to a space formed by the nozzle formation surface and the capping portion. The weight and the size of the head and its periphery, which is a movable body, are not specifically increased, and accordingly, increase in the cost for motors for driving the droplet jetting head is prevented, thereby effectively avoiding clogging in the nozzle opening of the droplet jetting head. In addition, it is unnecessary to move the droplet jetting head when the moisture retentive liquid is supplied.
申请公布号 US2005168517(A1) 申请公布日期 2005.08.04
申请号 US20050036351 申请日期 2005.01.18
申请人 SEIKO EPSON CORPORATION 发明人 USUDA HIDENORI
分类号 B41J2/165;B05C5/00;B41J2/01;B41J2/045;(IPC1-7):B41J2/165 主分类号 B41J2/165
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