EXTERNAL APPEARANCE INSPECTION DEVICE

摘要

An external appearance inspection device, where a placement table (2) holds a substrate (1) and swings the substrate (1). A light source (3) applies illumination light on the surface of the substrate (1). An imaging device (4) images the substrate (1), creates image data, and outputs the data to a control device (6). The imaging device (4) is placed near a viewing point (P) of an inspector. The control device (6) stores the image data, outputted from the imaging device (4), in its storage section.