发明名称 |
RADIO FREQUENCY POWER SUPPLY |
摘要 |
A plasma supply device includes a full bridge circuit that is connected to a DC power supply and that has two half bridges each with two series connected switching elements. The plasma supply device further includes a primary winding of a power transformer connected to centers of the half bridges between the switching elements. The primary winding includes a tapping connectable to an alternating current center between the potentials of the DC power supply.
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申请公布号 |
US2009026181(A1) |
申请公布日期 |
2009.01.29 |
申请号 |
US20080178372 |
申请日期 |
2008.07.23 |
申请人 |
HUETTINGER ELEKTRONIK GMBH + CO. KG |
发明人 |
KIRCHMEIER THOMAS;WINDISCH HANS-JUERGEN;KNAUS HANNS-JOACHIM;GLUECK MICHAEL |
分类号 |
B23K9/00 |
主分类号 |
B23K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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