| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device capable of preventing defective airtightness in a package by preventing the occurrence of a crack in a through hole of the package during seam welding. SOLUTION: In the piezoelectric device provided with a quartz oscillation element 11, a package 2 that is formed by an laminated substrate 20 obtained by laminating a plurality of insulating materials and that has an element mounting connection pad 3 for mounting the quartz oscillation element 11 on the upper surface side of the laminated substrate 20, a through-hole 7 for penetrating the upper and lower surfaces of the package 2, and a lid 6 for airtightly sealing an upper surface side space S of the package 2 which includes the quartz oscillation element 11 electrically connected to the connection pad 3. A metallized portion 24 with a prescribed film thickness and more is formed on an inwall of the through-hole 7 of an insulating substrate 21 located on the lowermost surface side of the laminated substrate 20. COPYRIGHT: (C)2009,JPO&INPIT
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