| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature sensor that is capable of being pressed on an object having various curved surface shapes or fine concavities and convexities on a surface thereof with a high contact pressure to measure precise surface temperatures.SOLUTION: A temperature sensor comprises a support 3 and a sensor 4 attached on the support. The sensor has an insulating film 5, a thin-film thermistor 6 that is patterned on the upper surface of the insulating film using a thermistor material, a pair of comb electrodes that have teeth and are patterned on the thin-film thermistor in such a manner that the comb electrodes face each other, and a pair of pattern electrodes that are patterned on the insulating film and have one end connected to the pair of comb electrodes. The support is an elastic body having a convex shape. The sensor is attached on the support in such a manner that the thin-film thermistor is provided on the top of the support.SELECTED DRAWING: Figure 1 |
