SUBSTRATE TRANSFER HAND

摘要

A substrate transfer hand is configured to sandwich a substrate between a plurality of receiving members and a gripping member and to fix the substrate by moving the gripping member with an actuator. The plurality of receiving members each have a flat plate-shaped support portion mounted on the main hand body, a substrate outer periphery holding portion supported on the support portion and configured to hold an outer periphery of the substrate, and a substrate lower surface holding portion supported on the support portion and configured to hold a lower surface of the substrate. The substrate outer periphery holding portion has a portion provided vertically from the support portion and configured to hold the substrate in contact with the outer periphery of the substrate. The substrate lower surface holding portion has a portion inclined from an outer peripheral side toward an inner side of the substrate to be held. The substrate outer periphery holding portion and the substrate lower surface holding portion are spaced from each other by a gap or a groove.

主权项

1. A substrate transfer hand comprising:
a main hand body having a flat plate shape; a plurality of receiving members provided on the main hand body and configured to hold an edge of a substrate; and a gripping member movably provided with respect to the main hand body and configured to grip the edge of the substrate, the gripping member being moved by an actuator to sandwich the substrate between the receiving members and the gripping member and to fix the substrate; wherein the plurality of receiving members each have a flat plate-shaped support portion mounted on the main hand body, a substrate outer periphery holding portion supported on the support portion and configured to hold an outer periphery of the substrate, and a substrate lower surface holding portion supported on the support portion and configured to hold a lower surface of the substrate; the substrate outer periphery holding portion has a portion provided vertically from the support portion and configured to hold the substrate in contact with the outer periphery of the substrate; the substrate lower surface holding portion has a portion inclined from an outer peripheral side toward an inner side of the substrate to be held; and the substrate outer periphery holding portion and the substrate lower surface holding portion are spaced from each other by a gap or a groove.