JOINED ARTICLE AND MEMBER FOR HOLDING WAFER AND STRUCTURE FOR MOUNTING THE SAME, AND METHOD FOR TREATING WAFER

摘要

A joined article, which comprises a plate-shaped ceramic article (3), a ring-shaped member (9) and a cylindrical metal member (7) having one end being joined to the under surface of the above plate-shaped ceramic article (3) via a metal joint (5) and another end being joined to the above ring-shaped member (9), wherein the above cylindrical metal member (7) relieves the stress owing to the difference in the thermal expansion coefficient between the plate-shaped ceramic article (3) and the ring-shaped member (9).