| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and laser beam machining apparatus that can prevent expansion of a heat-affected layer caused by excessive heat input and generation of micro crack due to supercooling, by optimizing a light intensity distribution profile in the irradiation face. <P>SOLUTION: The laser beam machining apparatus is composed of a laser oscillator 10 for outputting a nearly parallel laser beams LB, a converging optical system 30 having a converging power in the X direction, a converging optical system 40 having a converging power in the Y direction, and the like. The laser beams LB passed through the converging optical system 40 is provided with an elliptical beam shape PB having a major axis in the relative moving direction (Y direction), in the irradiation position B of a workpiece 50, wherein the light intensity distribution YB along the major axis is asymmetric. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
