DISPOSITIVO ELETTRONICO INTEGRATO PER LA RILEVAZIONE DI UN PARAMETRO LOCALE CORRELATO AD UNA FORZA AVVERTITA LUNGO UNA DIREZIONE PREDETERMINATA, ALL'INTERNO DI UNA STRUTTURA SOLIDA

摘要

The integrated electronic device is for detecting a local parameter related to a force experienced in a predetermined direction within a solid structure. The device includes a semiconductor substrate having a substantially planar region that defines a plane substantially perpendicular to the predetermined direction. At least one sensor detects the local parameter at least in the predetermined direction with a piezo-resistive effect. At least one substantially planar face is arranged in a portion of the integrated electronic device, the face belonging to a inclined plane by a predetermined angle relative to the plane perpendicular to the predetermined direction, which plane is defined by the substantially planar region of the substrate. The predetermined angle is defined such as to reduce forces acting in directions other than the predetermined direction at the portion of the device around the at least one sensor.