| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface profile measuring method by a plurality of wavelengths which can measure a concavo-convex level difference of a measuring object surface with a sufficient accuracy and high speed and to provide its system. SOLUTION: An interference fringe is generated by a reflection light which returns the same optical path from the measuring object surface 30A and a reference surface 15, by arranging the reference surface with slanting inclination posture of arbitrary angle to travelling direction of light. At this time, using monochromatic light having the plurality of different wavelengths, intensity values of each picture element of the interference fringe which is generated by each monochromatic light are pictured by an imaging device 19. Using an expression seeking the interference fringe waveform for each calculating object picture element, and utilizing the intensity value of each pixel and the intensity value of its neighbor pixel, CPU20 calculates a candidate value group of a phase in the interference fringe waveform of each pixel for each wavelength, by assuming that a direct current component, an alternating current amplitude, and the phase of the interference fringe waveform contained in each pixel are equal, and furthermore, calculates the surface height which is common from the plurality of the candidate value groups. COPYRIGHT: (C)2008,JPO&INPIT |
