| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve problems wherein ceramics conventionally used, such as glass, quartz, stainless steel and alumina, show a change in surface property by etching, produce particles by corrode, and thereby cause contamination. <P>SOLUTION: In a corrosion resistant member subjected to a halogen system etching gas or its plasma, at least a portion which is direct contact with the etching gas or its plasma consists of a sintered body or a single crystal which consists of a metal halide of higher melting point than the working temperature of the corrosion resistant member, or consists of the sintered body or the single crystal which consists of a metal or its compound which can form the metal halide of higher melting point than the working temperature of the corrosion resistant member by the reaction with the gas and/or the plasma, and the content of the metal or its compound, which can form the metal halide of lower melting point than the working temperature by the reaction with the etching gas and the plasma, is 1 weight% or less by metal conversion. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
