| 摘要 |
<p>A method for enhancing uniformity of metal oxide coatings formed by ALD or ALD-type processes. Layers are formed using alternating pulses of metal halide and oxygen-containing precursors, preferably water, with purging as required. Introduction of alcohol pulses following pulses of oxygen-containing precursor has a positive effect on layer uniformity, which commonly exhibits gradients, particularly in applications with closely arranged substrates. In particular, improvement in layer thickness uniformity is obtained.</p> |
