发明名称 |
Microelectromechanical device with optical function separated from mechanical and electrical function |
摘要 |
<p>In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.</p> |
申请公布号 |
EP2012168(A2) |
申请公布日期 |
2009.01.07 |
申请号 |
EP20080153252 |
申请日期 |
2008.03.25 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
ENDISCH, DENIS;MIGNARD, MARC MAURICE |
分类号 |
G02B26/00;B81B3/00 |
主分类号 |
G02B26/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|