发明名称 OPTIMIZED LASER PYROLYSIS REACTOR AND METHODS THEREFOR
摘要 An apparatus for making a set of Group IV nanoparticles is disclosed. The apparatus includes a top plate, the top plate further including an outlet port; a bottom plate; and a casing extending between the top plate and the bottom plate. The apparatus also includes a particle collector assembly configured to be in fluid communication with the outlet port; and a primary precursor tubing assembly passing through the bottom plate into the casing, the primary precursor tubing assembly including a primary precursor tubing assembly nozzle. The apparatus further includes a set of secondary precursor tubing assemblies passing through the bottom plate into the casing, wherein each secondary precursor tubing assembly of the set of secondary precursor tubing assemblies further includes a set of secondary precursor tubing assembly nozzles positioned orthogonally to the primary precursor tubing assembly nozzle, the set of secondary precursor tubing assembly nozzles further configured to be adjusted to a first height above primary precursor tubing assembly nozzle. The apparatus also includes a laser configured to generate a laser beam, the laser beam being substantially perpendicular to the primary precursor tubing assembly nozzle in the reaction zone, wherein the laser may be adjusted to a second height above primary precursor tubing assembly nozzle.
申请公布号 US2009026421(A1) 申请公布日期 2009.01.29
申请号 US20080054133 申请日期 2008.03.24
申请人 LI XUEGENG;JURBERGS DAVID 发明人 LI XUEGENG;JURBERGS DAVID
分类号 H01B1/04;C23C16/02;H01L21/205 主分类号 H01B1/04
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