| 摘要 |
PROBLEM TO BE SOLVED: To provide cleaning equipment and a cleaning method for performing cleaning without causing environmental contamination and, moreover, reliably to details. SOLUTION: The cleaning equipment includes: a first gas shear part 21 for mixing and shearing liquid and nitrogen to prepare nitrogen microbubble-containing water; a second gas shear part 22 for further shearing the nitrogen microbubble-containing water to prepare nitrogen nanobubble-containing water; a first activation means 28 which applies a magnetic field to the nitrogen nanobubble-containing water; a third gas shear part 4 for further shearing the nitrogen nanobubble-containing water after the magnetic field is applied; and a tank 1 from which the nitrogen nanobubble-containing water further sheared by the third gas shear part is ejected, whereby an object 3 to be cleaned is cleaned by the cleaning equipment. COPYRIGHT: (C)2009,JPO&INPIT
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