发明名称 Overhead buffer and transfer method of the same
摘要 <p>First support members (6) are attached to a ceiling (4) at a fixed pitch, so that raceways (8) each including a horizontal opening (32) in a lower portion are supported by the first support members (6), and second support members (12) are attached to the raceways (8) to install a shelf for placing an article, at lower ends thereof.</p>
申请公布号 EP2071617(A2) 申请公布日期 2009.06.17
申请号 EP20080020463 申请日期 2008.11.25
申请人 MURATA MACHINERY, LTD. 发明人 KATO, SUSUMU
分类号 H01L21/67;H01L21/677 主分类号 H01L21/67
代理机构 代理人
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