COOLING APPARATUS HAVING COOLANT LEAK SENSOR

摘要

A cooling apparatus having a coolant leak sensor is provided to prevent damage of a chiller by confirming efficiently and effectively the leakage of the coolant in a real-time period. A cooling unit(250) cools heat generated from a heat generation part of a semiconductor manufacturing process part. A coolant supply unit(100) supplies or collects a coolant for performing a heat exchange operation of the cooling unit. A coolant line(300) is used for supplying or collecting the coolant. A leak sensor cable(400) is wound around the coolant line in order to sense the leakage of the coolant from the coolant line. An alarm unit(500) receives a coolant leakage signal and outputs an alarm signal to a worker.