发明名称 An imaging apparatus and method
摘要 A method for imaging a sample, the method comprising the steps of: (a) irradiating the surface of a sample with a source of coherent substantially continuous radiation with a frequency in the range 25 GHz to 100 THz; (b) detecting said radiation reflected from or transmitted by the sample; (c) providing and detecting a probe beam having a phase related to that of the radiation leaving the source; (d) analysing the detected radiation for at least one characteristic feature within the radiation and monitoring any change in phase of such at least one feature in order to derive structural information about the sample as a function of depth from the surface of the sample.
申请公布号 GB2418337(B) 申请公布日期 2008.07.16
申请号 GB20040020748 申请日期 2004.09.17
申请人 TERA VIEW LIMITED;TERAVIEW LIMITED 发明人 WILLIAM ROYLAN TRIBE;WILLIAM ROYLAN TRIBE
分类号 G01N21/49;G01N21/35 主分类号 G01N21/49
代理机构 代理人
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