SILICON PARTICLE TREATING BEDPLATE, ITS MANUFACTURING METHOD AND METHOD FOR MANUFACTURING SINGLE CRYSTAL SILICON PARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a silicon particle treating bedplate which is thermally stable and prevented from being deformed and allows the manufacturing of crystalline silicon particles having high crystallinity at a low cost.

SOLUTION: The silicon particle treating bedplate 1 is used for making silicon particles mounted on its upper surface into the single crystal silicon particles by melting and then solidifying the silicon particles. In the bedplate 1, a cristobalite crystal layer 1b is formed on the surface of a base body 1a made of quartz glass, and the cristobalite crystal layer 1b functions as a surface reinforcing layer. Thereby, the thermal deformation of the base body 1a can be prevented.

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