Assembly device for projection objective in semiconductor fabrication lithography, has lifting device and setting angle for positioning structural parts

摘要

An assembly device for optical devices, has support structure with several structural parts (1,2) modules and optical components with a assembly table (30 that is fitted with a lifting unit (4) and a setting angle (5) for positioning and for joining the structural parts (1,2) to the support structure. Independent claims are included for the following. (1) (A) An auxiliary device for assembling an optical device (2) (B) A safety/locking device for an optical component group.