发明名称 RECYCLIZATION METHOD FOR TREATMENT PROCESS
摘要 PROBLEM TO BE SOLVED: To provide a recyclization method for a treatment process in which, in an inspection method and an assembly method, recyclization for the treatment process is made possible and design of a flow can be simply performed.SOLUTION: A recyclization method for a treatment process is equipped with treatment cycle having a plurality of treatment segments and has one or a plurality of kinds of execution processes in each treatment segment. A plurality of kinds of treatment segments having the execution process set in advance are formed and the treatment cycle is determined which has the plurality of treatment segments selected from the plurality of kinds of these treatment segments.
申请公布号 JP2014146758(A) 申请公布日期 2014.08.14
申请号 JP20130015802 申请日期 2013.01.30
申请人 CANON MACHINERY INC 发明人 KAWAMURA TATSUYUKI
分类号 H01L21/02;H01L21/66 主分类号 H01L21/02
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