ELEMENT SUBSTRATE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an element substrate wherein a metal layer is formed with sufficient accuracy, and to provide its manufacturing method. SOLUTION: The method includes: a step of forming a release layer on a first supporting substrate; a step of forming a metal layer 33 of a predetermined pattern on the release layer; a process for arranging a second supporting substrate 110 above the first supporting substrate 10 while putting the metal layer in-between; a step of pouring in a resin material 114a in a state of fluidity between the first supporting substrate and the second supporting substrate; a step of curing the resin material and for forming a resin substrate 114; a step of transferring the metal layer to the resin substrate while releasing the metal layer from the first supporting substrate by decomposing the exfoliation layer; and a step of polishing the backside of the resin substrate. COPYRIGHT: (C)2008,JPO&INPIT