METHOD TO PREVENT THE ABNORMAL LARGE GRAIN INCLUSION IN THE NANOCRYSTALLINE DIAMOND FILM

摘要

A method for preventing the abnormal large grain inclusion in the nanocrystalline diamond film is provided to prevent abnormal large grain inclusion from being interposed in the NCD(Nano-Crystalline Diamond) thin film evaporated by the hot filament chemical vapor deposition. In the process of depositing the NCD thin film by using the hot filament chemical vapor deposition process, the interposing of the abnormal large grain inclusion among the NCD thin film is prevented by using one or more among the following method. After the inert material is extended from the substrate to 50 mm over, the temperature of the inert material is measured by a thermocouple. The material having inactive and the high heat conduction is coated on the thermocouple. The contactless temperature measurement means is used.