| 摘要 |
The present invention relates to a purge gas injection plate and a manufacturing method thereof. Specifically, in the manufacturing method of the purge gas injection plate on which a purge gas is applied, the purge gas injection plate is formed by a combination of a first plate and a second plate, and a flow path is formed on at least any one of the first and second plates, thereby achieving compactification of a fume removing apparatus having the purge gas injection plate. |
