| 发明名称 |
APPARATUS FOR REMOVING FUME |
| 摘要 |
The present invention relates to a fume removal apparatus. Especially, the present invention relates to a fume removal apparatus which has a surface for covering a wafer in a cassette to be at least partially transparent or translucent, so as to enable an operator to easily view, thereby smoothly performing a fume removal process. |
| 申请公布号 |
KR20160109103(A) |
申请公布日期 |
2016.09.21 |
| 申请号 |
KR20150032917 |
申请日期 |
2015.03.10 |
| 申请人 |
PICOANDTERA |
发明人 |
WOO, BUM JE;KIM, YOUNG CHUL;KIM, SANG HYUN;HAN, MYOUNG SOK |
| 分类号 |
H01L21/02;H01L21/60;H01L21/673 |
主分类号 |
H01L21/02 |
| 代理机构 |
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