发明名称 METHOD AND APPARATUS FOR GROWTH OF SILICON-CARBIDE SINGLE-CRYSTAL
摘要 The present invention relates to a method for growing a silicon carbide monocrystal, which comprises the following steps of: enabling a seed attached to a seed connection rod to be adjacent to the growth surface of the seed in a molten solution including Si and C stored in a crucible; and applying a direct current to the seed and the crucible. In addition, the present invention relates to an apparatus for growing a silicon carbide monocrystal, which comprises: a crucible in which a raw material including Si and C are stored; a resistance heater for covering the crucible; a seed positioned on the upper unit of the crucible, and moved up and down by the seed connection rod; and a direct current power device for connecting an anode to the seed and the cathode to the crucible.
申请公布号 KR20160108887(A) 申请公布日期 2016.09.21
申请号 KR20150032248 申请日期 2015.03.09
申请人 SK INNOVATION CO., LTD. 发明人 HONG, SUNG WAN;BAE, HEUNG TAEK
分类号 C30B19/10;C30B29/36 主分类号 C30B19/10
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