| 摘要 |
The present invention relates to a micro-electro-mechanical device for detecting angular velocity and especially to a three axis gyroscope. The three axis gyroscope comprises a two axis gyroscope structure (200) and a one axis gyroscope structure (100). The gyroscope further comprises a lever spring system (300) coupling a linear drive mode oscillation of the two axis gyroscope structure (200) and a linear drive mode oscillation of the one axis gyroscope structure (100) into one combined primary motion. The lever spring system (300) causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other. |
