| 摘要 |
PROBLEM TO BE SOLVED: To provide a deficiency inspection device and deficiency inspection method that detect fine defects (deficiencies) with respect to cylindrical works with prolongation of a measurement time, and hardly determine that the defects are not detected even if many sub-defects exist.SOLUTION: By an imaging unit 2, as rotating a cylindrical inspection object illuminated from a prescribed direction with a rotating axis as an axis, a first-order image of a lateral face along a direction of the rotation axis is photographed to output the first-order image as a multi-value image. By a control unit 3, a lateral development image (inspection image) indicative of a synthesis image of the first-order image in one round of the inspection object photographed by the imaging unit 2 is created as the multi-value image is, and on the basis of a correlation value between the lateral development image and a reference image indicative of a preliminarily created lateral development image corresponding to a normal inspection object, deficiencies of the inspection object are detected.SELECTED DRAWING: Figure 1 |
