| 摘要 |
An excimer laser includes: an alumina tube which has a purity of 99.9% by weight or more, a density of 3.99 g/cm<SUP>3 </SUP>or more, an open porosity of less than 0.3%, and a dielectric strength voltage of 15 kV/mm or more and which includes a hollow portion; an inner electrode for corona discharge which is disposed in the hollow portion of the alumina tube; and an outer electrode for corona discharge which is disposed so as to contact an outer circumferential surface of the alumina tube.
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