Method of manufacturing a semiconductor acceleration sensor

摘要

A semiconductor acceleration sensor including a central board (1) having a movable electrode section, an outside board (2a,2b) having a stationary electrode section (21a,21b), and a sealing insulating section (3a,3b) for joining the central board (1) and the outside board (2a,2b) which are laminated on each other, wherein the sealing insulating section (3a,3b) has a conductive layer (31a,31b), and the conductive layer is a sealing member or an anode junction electrode.