发明名称 VORRICHTUNG UND VERFAHREN ZUM GETRENNTEN TRANSPORTIEREN VON SUBSTRATEN
摘要 A device and a method for separately transporting substances are provided. The device and method according to the invention can especially be used in connection with an unit for producing DVDs. Preferably, the device according to the invention has for each substrate an input station, a processing station and an output station, which stations are arranged on the circular arc at given distances alpha. Furthermore, grippers are provided, which are arranged on said circular arc at given distances alpha and can be simultaneously rotated around an axis through the center of said circle through an angle beta. Each gripper transports one substrate to the processing and output stations in a rotational movement. It is the advantage of the invention that the mixing-up of substrates is avoided.
申请公布号 DE59813939(D1) 申请公布日期 2007.04.19
申请号 DE1998513939 申请日期 1998.05.26
申请人 SINGULUS TECHNOLOGIES AG 发明人 KEMPF, STEFAN
分类号 H01L21/00;B65G49/07;G11B7/26;H01L21/677 主分类号 H01L21/00
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