| 摘要 |
PROBLEM TO BE SOLVED: To provide a charging device that has a mixing section with a sample gas hardly having positive pressure, and has no dehumidifying mechanism in a main channel where the sample gas flows. SOLUTION: The charging device INZ includes a charging section 41 for charging supplied gas to be charged and generating charged gas, and the mixing section 43 that is disposed in the downstream of the charging section 41, generates charged aerosol by mixing the charged gas with the sample gas introduced at a flow rate Qa, and discharges it to further downstream. The downstream of the mixing section 43 includes a pump P2 for sucking a part of the charged aerosol from the downstream of the mixing section 43 and transporting it to the upstream of the charging section 41, a filter F2 for removing particles in the aerosol when the pump P2 transports the charged aerosol, and a flow rate regulating section MFC2 for measuring and regulating the flow rate of the gas to be charged, thereby forming a half-closed channel system. The sample gas is introduced from the upstream of the mixing section 43. COPYRIGHT: (C)2008,JPO&INPIT
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