| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment device for a glass substrate capable of preventing attachment of particles to the glass substrate even when airtightness of an opening and closing door is not kept. SOLUTION: In this heat treatment device for the glass substrate provided with a heating chamber 3 comprising a heater, and an opening and closing cover 5 disposed on a substrate housing port 4 of the heating chamber, inside of a furnace body, an exhaust pipe 7 is disposed below the substrate housing port toward the lateral direction of the furnace body, an air intake suction hole 11 is formed on a top face of the exhaust pipe, and a gas and foreign substances inside of the heating chamber can be sucked through the suction hole. COPYRIGHT: (C)2008,JPO&INPIT
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