| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carbon composite member which is hard to slide, excellent in workability, and usable as a member for semiconductor manufacturing apparatus. <P>SOLUTION: The carbon composite member 1 is composed of a carbon base material 10 and a pyrolytic carbon layer 11 formed on the carbon base material 10. Projections 12 are formed on the surface of the pyrolytic carbon layer 11, wherein the projections 12 are formed by crystal growing the pyrolytic carbon around carbonaceous powder 13 as nuclei, the minor axes of the projections 12 are in the range of 5-3,000 μm, and the surface density thereof is in the range of 10<SP>2</SP>-10<SP>8</SP>/m<SP>2</SP>. <P>COPYRIGHT: (C)2008,JPO&INPIT |
