Charged Particle Beam Apparatus, Image Forming Method Using a Charged Particle Beam Apparatus, and Image Processing Apparatus

摘要

To provide a charged particle beam apparatus capable of obtaining an image with high contrast and high visibility, the apparatus has: a charged particle optical system; a detection part to detect secondary charged particles generated from the sample; an image formation part to receive a detection signal from the detection part and form an image of the sample; an image processing part to process the image formed with the image formation part; and a display part to display the result of processing with the image processing part, wherein the image formation part has a pulse-count signal processing part to generate cumulative histogram information on a pulse signal component in the detection signal, set a threshold value for pulse signal detection using information on the generated cumulative histogram, and output a detection signal having a value higher than the set threshold value as a pulse signal.

主权项

1. A charged particle beam apparatus comprising:
a charged particle optical system that emits a converged charged particle beam and scans the beam on a surface of a sample; a detection part that detects secondary charged particles which are generated from the sample irradiated with the charged particle beam with the charged particle optical system; an image formation part that receives a detection signal from the detection part and forms an image of the sample; an image processing part that processes the image formed with the image formation part; and a display part that displays the result of processing with the image processing part, wherein the image formation part has a pulse-count signal processing part that generates cumulative histogram information on a pulse signal component in the detection signal from the detection part, sets a threshold value for pulse signal detection using the generated cumulative histogram information, and outputs a detection signal having a value higher than the set threshold value as a pulse signal.