| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter, in which electric conduction can be achieved by a simple configuration, an optical module, and an optical analyzer.SOLUTION: An etalon 5 includes a fixed substrate 51 and a movable substrate 52 opposing to the fixed substrate 51. The fixed substrate 51 includes: a first bonding surface 515 bonded to the movable substrate 52 via bonding films 531, 532; and a first electrode surface 516 where a part of a first electrode 561 is formed. The movable substrate 52 includes: a second bonding surface 524 to be bonded to the first bonding surface 515 via the bonding films 531, 532; and a second electrode surface 525 where a part of a second electrode 562 is formed. While the fixed substrate 51 and the movable substrate 52 are bonded by the bonding films 531, 532, the first electrode 561 formed on the first electrode surface 516 is in contact with the second electrode 562 formed on the second electrode surface 525.SELECTED DRAWING: Figure 3 |
