发明名称 |
LIGHT-EMITTING ELEMENT, METHOD OF MANUFACTURING LIGHT-EMITTING ELEMENT, AND SUBSTRATE TREATMENT DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a high-quality light-emitting element, a method of manufacturing the light-emitting element, and a substrate treatment device capable of manufacturing the light-emitting element. SOLUTION: The substrate treatment device for forming on a treatment substrate light-emitting elements made by forming an organic layer including a light-emitting layer between a first electrode and a second electrode is provided with an organic layer forming device for forming the organic layer on the first electrode formed on the treatment substrate, an electrode forming device for forming the second electrode on the organic layer, and an etching device for etching the organic layer. COPYRIGHT: (C)2007,JPO&INPIT
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申请公布号 |
JP2007220360(A) |
申请公布日期 |
2007.08.30 |
申请号 |
JP20060036917 |
申请日期 |
2006.02.14 |
申请人 |
TOKYO ELECTRON LTD;TOYOTA INDUSTRIES CORP;TOHOKU UNIV |
发明人 |
NOZAWA TOSHIHISA;MOYAMA KAZUKI;KAWAMURA CHUICHI;YOSHINO KIMIHIKO;OMI TADAHIRO |
分类号 |
H05B33/10;H01L51/50;H05B33/26 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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