| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of laser beam machining, which method can accurately form a reformed region at a required position on the surface of a workpiece to be irradiated with a laser beam. <P>SOLUTION: When an average difference γ has a value exceeding a required threshold value in a tracing record, a particle section Z including a line section S where the average difference γ has exceeded the required threshold value is determined. By this method, it is judged that particles exist on the planned cutting-off line 5 and a laser beam for measuring is irregularly reflected by the particles, and the sections having an effect on a control signal because of the existence of the particles in a planned cutting-off section is detected as the particle section Z. The excessive movement of a condenser lens due to the error included in the control signal because of the existence of the particles is suppressed by correcting the control signal in the particle section Z, and the converged point of a laser beam for machining can accurately trace a surface 3. <P>COPYRIGHT: (C)2008,JPO&INPIT |
