| 摘要 |
PROBLEM TO BE SOLVED: To provide a defection inspection apparatus, a defect inspection method and a lighting device, capable of detecting a defect generated in an inspection target without moving or rotating a slit part for generating a stripe pattern to be applied to the inspection target.SOLUTION: The defect inspection apparatus includes: a light source part for emitting light; an orthogonal direction shading part arranged in a direction orthogonal to a traveling direction of an inspection target and capable of shading a part of light emitted from the light source over the orthogonal direction; a slit part for applying a stripe pattern formed by light not shaded by the orthogonal direction shading part to the inspection target over the orthogonal direction; an imaging part for imaging the stripe pattern applied from the vicinity of a boundary between the orthogonal direction shading part and the slit part and transmitted through the inspection target; and a detection part for detecting a defect generated in the inspection target on the basis of contrast of the imaged stripe pattern. |
