发明名称 DETECTION METHOD OF BONDING WIRE AND DETECTOR OF BONDING WIRE
摘要 PROBLEM TO BE SOLVED: To provide a detection method of bonding wire and a detector of bonding wire capable of identifying a wire becoming a detection object accurately by a simple method.SOLUTION: In a detection method of a bonding wire for detecting a wire 20 bonded to a connection surface 21 three-dimensionally, the full focus image 22 of the wire 20 and the connection surface 21 and the distance image 25 are created, the connection surface region 31 is identified from the full focus image 22, the wire region 20 and the region other than the wire are separated from the height information of the distance image 25, the wire region 30 in the distance image 25 is associated with the full focus image 22, the wire region 30 in the full focus image 22 is identified, the wire region 30 connecting the one connection surface region 31 and the other connection surface region 31 of the wire becoming a detection object, out of the wire region 30 of the full focus image 22, is extracted and identified as the wire of detection object.SELECTED DRAWING: Figure 1
申请公布号 JP2016157720(A) 申请公布日期 2016.09.01
申请号 JP20150032768 申请日期 2015.02.23
申请人 CANON MACHINERY INC 发明人 ONO HIROYUKI;FURUSE KAZUFUMI;KOTO ATSUSHI
分类号 H01L21/60;G01B11/00;G01B11/24 主分类号 H01L21/60
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