CRYSTAL LAMINATE STRUCTURE, AND PRODUCTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a crystal laminate structure having a β-GaOsingle crystal film grown by a growth method of β-GaOand capable of growing a β- GaOsingle crystal film with a high quality and a large diameter efficiently, and a production method therefor.SOLUTION: According to one embodiment, provided are a crystal laminate structure manufactured by a growing method of a β-GaOsingle crystal film by the HVPE method comprising the step of exposing a GaOsubstrate 10 to a gallium chloride gas and an oxygen containing gas to grow a β-GaOsingle crystal film 12 on the principal face 11 of the β-GaOsingle crystal film at a growing temperature of 900°C or higher on the GaOsubstrate 10, and a manufacturing method therefor.SELECTED DRAWING: Figure 2